過濾器 - 擴散器 - Diffusers - Diffusers
Diffusers are used in vent applications on load lock chambers, transfer chambers, cooling chambers, and process chambers of Semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers.
GasShield® Diffusers quickly vent vacuum chambers to atmosphere which decreases cycle time and increases throughput. Our stainless steel diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 µm from incoming gas, minimizing defects on the wafer. Stainless steel diffusers can withstand higher operating pressures and maintain product integrity for more than three million cycles – the longest lifetime in the industry. And, for corrosion resistance that is superior to stainless steel and nickel, use GasShield® Hastelloy® C-22 Diffusers.
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