GasShield POU Filter SS316L 2500psig 172,4barg 0.0015um 1/2inch Male/Male Face Seal
Article no.: 31331155
GasShield POU Filter SS316L 2500psig 172,4barg 0.0015um 1/2inch Male/Male Face Seal
Article no.: 31331155
Available for registered users.
High purity gas filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. For maximum gas filtration efficiency, strength and reliability, GasShield point-of-use gas filters are ideal for ultra high purity gas delivery applications. They are compatible with most high purity electronics grade process gases.
Article
31331155
Header [Brand]
Point-of-Use Filter
Description
Point-of-Use Filter >0.0015μm Face seal male 1/2 SS316L < 5µm Ra
Material
SS 316L
Material sintered filter media
SS 316L
Maximum working pressure
172.5 barg
He leak rate
Up to 10-9 atm cc/sec
Maximum differential pressure
68.9 bar
Max. operating temperature
450° C
Connection type
Face seal male/Face seal male
Particle shedding
Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Particle removal size
> 0.0015 μm
Filter efficiency (log reduction value)
> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
Polishing
Electro polishing
Surface finish
<5µm Ra
Tariff code
84213925
Country/Region of Origin
US
C
Face seal male 1/2
Ø D
38,1 mm
L
84 mm
SW (HEX)
26,9
Remarks
Custom designs and fittings available
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