Sentry Series Point-of-Use Gas Filter >0.0015μm Face seal male 1/4 SS316L
Article no.: 31331445
Sentry Series Point-of-Use Gas Filter >0.0015μm Face seal male 1/4 SS316L
Article no.: 31331445
Available for registered users.
The Sentry Series point-of-use filters are cost-effective, all-metal, ultra high purity gas filters that utilize a patented Penta nickel media and provide 9-log filtration of particles down to 0.0015 µm, resulting in particle-free gas.
Article
31331445
Header [Brand]
Sentry Series Point-of-Use Gas Filter
Description
Sentry Series Point-of-Use Gas Filter >0.0015μm Face seal male 1/4 SS316L < 10µm Ra
Material
SS 316L
Material sintered filter media
Penta Nickel
Maximum working pressure
206.8 barg
He leak rate
Up to 10-9 atm cc/sec
Maximum differential pressure
34.5 bar
Max. operating temperature
450° C
Connection type
Face seal male/Face seal male
Particle shedding
Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Particle removal size
> 0.0015 μm
Filter efficiency (log reduction value)
> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
Polishing
Electro polishing
Surface finish
<10µm Ra
C
Face seal male 1/4
Ø D
38,1 mm
L
84 mm
SW (HEX)
15,9
Remarks
Custom designs and fittings available
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