Point-of-Use Filter >0.0015μm Buttweld 6,35 mm SS316L

Name: Point-of-Use Filter >0.0015μm Buttweld 6,35 mm SS316L < 5µm Ra
SKU: 31331615
Availability: InStock

Article no.: 31331615

Point-of-Use Filter >0.0015μm Buttweld 6,35 mm SS316L

Article no.: 31331615

Available for registered users.

Description

For high flow gas filtration efficiency, strength, and reliability, GasShield Penta® all-metal gas filters are ideal for ultra high purity gas delivery applications. They are offered in all welded 316L stainless steel housings with Penta® Nickel filter media and are compatible with most high purity semiconductor process gases. These filters provide 9-log filtration of particles down to 0.0015 µm.

Article properties

Article

31331615

Header [Brand]

Point-of-Use Filter

Description

Point-of-Use Filter >0.0015μm Buttweld 6,35 mm SS316L < 5µm Ra

Material

SS 316L

Material sintered filter media

Penta Nickel

Maximum working pressure

258.5 barg

He leak rate

Up to 10^-9 atm cc/sec

Maximum differential pressure

34.5 bar

Max. operating temperature

450° C

Connection type

Butt Weld Tube Stubs

Particle shedding

Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method

Total hydrocarbons

Below detectable limits per ASTM F1398 test method

Moisture contribution

<10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method

Particle removal size

> 0.0015 μm

Filter efficiency (log reduction value)

> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method

Polishing

Electro polishing

Surface finish

<5µm Ra

Dimensions

6,35 mm

Ø D

19 mm

127 mm

Remarks

Custom designs and fittings available

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