Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 35000 SLPM SS316L
Article no.: 31363160
Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 35000 SLPM SS316L
Article no.: 31363160
Available for registered users.
Bulk Filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. In addition, the flow versus differential pressure performance of the filter is equal or superior to the performance of competitive polymer products on the market today.
Article
31363160
Header [Brand]
Bulk Gas Filter
Description
Bulk Gas Filter >0.0015μm Buttweld 101.6 mm 35000 SLPM SS316L < 10µm Ra
Material
SS 316L
Material sintered filter media
Penta Nickel
Maximum working pressure
27.6 barg
He leak rate
Up to 10-9 atm cc/sec
Maximum differential pressure
17.2 bar
Flow rate
35000 SLPM
Max. operating temperature
450° C
Connection type
Tube Stub
Particle shedding
Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Particle removal size
> 0.0015 μm
Filter efficiency (log reduction value)
> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
Polishing
Electro polishing
Surface finish
<10µm Ra
C
101.6 mm
Ø D
152,4 mm
L
594,6 mm
Remarks
Custom designs and fittings available
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