High-purity diffusers

Mott high-purity diffusers are specially developed for process rooms, load locks and wafer steppers where particle formation must take place as slowly and gradually as possible. By using the porous metal diffuser a laminar flow is maintained resulting in a minimal displacement of the particles in the process.

Different configurations of diffusers

The all-metal point-of-use diffusers are available in various degrees of the filter element and can be carried out with a vacuum flange, a face seal connection or a ring shape.

For more information please contact one of our Sales Engineers!