Ultra high purity corrosive gas filtration in the following applications: gas sticks for equipment hookup, valve manifold boxes, gas cabinets, tool isolation gas boxes, and on-board OEM tool gas boxes.
High purity gas filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. For maximum gas filtration efficiency, strength and reliability, GasShield point-of-use gas filters are ideal for ultra high purity gas delivery applications. They are compatible with most high purity electronics grade process gases.
WE MAKE YOUR TECHNOLOGY WORK
NL - Tel. +31 70 413 07 50
USA - Tel. +(1) 973 383 0691
CN - Tel. +86 (10) 56865822/56865835
TW - Tel. +886-(0)3-5600560