Ultra high purity gas sticks for semiconductor, LED, photovoltaic and MEMS equipment hookup. Ultra high purity filtration in valve manifold boxes, gas cabinets, tool isolation gas boxes, on-board gas delivery boxes or any process requiring ultra high purity particle removal.
The Sentry Series point-of-use filters are cost-effective, all-metal, ultra high purity gas filters that utilize a patented Penta nickel media and provide 9-log filtration of particles down to 0.0015 µm, resulting in particle-free gas.
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