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Purifiers

Chemical purification of gases

The chemical purity of gases determines the success of high-tech sectors such as the semiconductor industry. Maintaining these stringent process requirements requires purification solutions capable of maintaining gas integrity at a wide range of temperatures, flow rates and pressure levels.

It is a diverse range of gases that need to be ultra pure, from highly aggressive and toxic substances, to inert gases. Teesing supplies purifiers that are used in 3 places in the factory:

Central purification of gas on entry to the site: Bulk purifiers.
Purification at the point where the gas feeds several machinery: Micro-bulk gas purifiers, or Area purifiers.
Purification directly at the point of use: Point-of-use purifiers

Purifier category	Bandwidth flow rate
Point-of-use	0,1 - 100 slpm
Micro-bulk	100 - 1200 slpm
Bulk	60 - 20.000 nm³/hr

Illustration: Click to enlarge. Most common purifier applications in semicon fabs and laboratories.

Ultra high purity purifiers

Teesing provides a versatile range of gas purifiers that have been trusted by industrial innovators worldwide for over 20 years. From the smallest point-of-use purifier to the most complex bulk system, our purification solutions reliably meet mission critical gas delivery requirements for any application. In addition to supplying new purifiers, we also have a regeneration laboratory where we can regenerate 5 purifiers simultaneously.

Photo: Examples of point-of-use purifiers. Usually provided with VCR couplings and in appearance hardly to distinguish from filters.

Purifiers in various industries

The purifiers we supply are used in very different industries. Among our clients are companies involved in:

LED device manufacturing
Silicon Carbide (SiC) epitaxy
Crystal growth
Photovoltaic production
III/V and II/VI MOCVD processes
Polysilicon manufacturing
Silicon & compound semiconductor
Fuel cells / hydrogen
Research laboratory
Vacuüm technology
Precision welding
High quality bulk gas production

Photo: Example of a micro-bulk cleaner used in a research laboratory.

Subcategories

Point-of-use gas purifiers

Are installed directly at the place of the consumer. Usually with a flow rate of 0.1-100 slpm.

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Micro-bulk purifiers, also known as Area purifiers

Micro-bulk gas purifiers

Also called Area purifiers. Are often used to feed a number of machines with ultra pure process gas. Nominal flows 100-1200 slpm.

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Bulk gas purifiers

Gas supply in semicon fabs, or at industrial gas suppliers. Flows of 60-20.000 nm³/h.

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Purifier regeneration

Fast, expert regeneration of all makes and types of purifiers.

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Articles about purifiers:

Webinar: Everything You Need to Know About Purifiers.Application story: Improving the quality of UHP gas.Customer story: Bulk purifier for NXP Semiconductors.

Link:
Is your contamination not gaseous, but liquid or solid in gas? Then you do not need a purifier, but a filter.

Downloads

Point of use purifiers - Brochure

Micro-bulk purifiers - Brochure

Purifier request form

Any Questions?

More information about our products, services or looking for a custom solution?
Please contact our Sales Engineers.

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