Micro-bulk gas purifiers
Chemical purification of gas for flow rates of 100-1200 nlpm.
Micro-Bulk purifiers typically offer moderate flow rates and purify up to 9N. Typical applications are laboratories that have a number of points of use. Or they serve production areas where there are a number of machines (then they are usually called "Area purifier"). The micro-bulk purifier typically has permanently installed UHP piping to each point of use.
Micro-bulk purifiers can be supplied as stand-alone vessels or in a configuration with 2 parallel vessels. This enables 24/7 operation, as the two vessels take turns purifying and running in the regeneration process.
The parallel arrangement can be in the form of an open skid, with manually operated controls and valves. Another common form is in a closed cabinet, where controllers are automatically controlled from a PLC. This is the interface between bulk purifiers, as they use the same setup. The only difference between a micro-bulk purifier and a bulk purifier is the maximum flow rate, which will be smaller and that makes the size of the cabinet smaller as well.
Dimensioning of the purifier vessel
Teesing's engineering department designs purifier skids, panels and cabinets. We source the purifiers themselves from a trio of suppliers, although it is increasingly common for us to also weld the purifiers in house, equip them with inlet and outlet filters and fill them with the appropriate medium. We usually design with these company factors in mind:
- Dimensions are based on a life of 1 or 2 years at nominal process flow.
- The dimensions also determine the achievable purity. We calculate with an inlet purity of 5N and a desired outlet purity of 9N.
The appropriate vessel size is based on the expected flow rate of the gas to be purified, the impurity input, and the desired life between regeneration or replacement. In some cases, it is desirable to increase the vessel size to increase the purity to be achieved or to extend the duty cycle. Nominally, our micro-bulk purifiers remove impurities to better than 100 PPT at a rated life of one year. The purifiers are always equipped with solids filters at the input. The maximum flows that can be realized depend on the chosen filtration option: 3nm or 1nm. These filters cannot be seen as a solution for particle pollution. They do not have enough capacity for that. They are only meant to protect the purifier. If there is chemical contamination as well as particle contamination, a separate filter is the solution.
Photo: Two 11 litre purifiers combined into a micro-bulk purifier with automatic regeneration.
Subcategories
Point-of-use gas purifiers
Are installed directly at the place of the consumer. Usually with a flow rate of 0.1-100 slpm.
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Micro-bulk gas purifiers
Also called Area purifiers. Are often used to feed a number of machines with ultra pure process gas. Nominal flows 100-1200 slpm.
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Bulk gas purifiers
Gas supply in semicon fabs, or at industrial gas suppliers. Flows of 60-20.000 nm3/h.
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